РОССИЙСКАЯ АКАДЕМИЯ НАУК

УРАЛЬСКОЕ ОТДЕЛЕНИЕ

ИНСТИТУТ ХИМИИ TBEPДОГО ТЕЛА
   
| | | | |
| | | |
 31.10.2008   Карта сайта     Language По-русски По-английски
Новые материалы
Экология
Электротехника и обработка материалов
Медицина
Статистика публикаци


31.10.2008

Nanoscale dimensioning is fast, cheap with new NIST optical technique

















This schematic shows how a TSOM image is acquired. Using an optical microscope, several images of a 60 nanometer gold particle sample (shown in red) are taken at different focal...

Click here for more information.




A novel technique* under development at the National Institute of Standards and Technology (NIST) uses a relatively inexpensive optical microscope to quickly and cheaply analyze nanoscale dimensions with nanoscale measurement sensitivity. Termed “Through-focus Scanning Optical Microscope” (TSOM) imaging, the technique has potential applications in nanomanufacturing, semiconductor process control and biotechnology.


Optical microscopes are not widely considered for checking nanoscale (below 100 nanometers) dimensions because of the limitation imposed by wavelength of light—you can’t get a precise image with a probe three times the object’s size. NIST researcher Ravikiran Attota gets around this, paradoxically, by considering lots of “bad” (out-of-focus) images. “This imaging uses a set of blurry, out-of-focus optical images for nanometer dimensional measurement sensitivity,” he says. Instead of repeatedly focusing on a sample to acquire one best image, the new technique captures a series of images with an optical microscope at different focal positions and stacks them one on top of the other to create the TSOM image. A computer program Attota developed analyzes the image.
















Using an optical microscope, several images of a 60 nanometer gold particle sample are taken at different focal positions and stacked together. This computer-created image shows the resultant TSOM image....

Click here for more information.




While Attota believes this simple technique can be used in a variety of applications, he has worked with two. The TSOM image can compare two nanoscale objects such as silicon lines on an integrated circuit. The software “subtracts” one image from the other. This enables sensitivity to dimensional differences at the nanoscale—line height, width or side-wall angle. Each type of difference generates a distinct signal.


TSOM has also been theoretically evaluated in another quality control application. Medical researchers are studying the use of gold nanoparticles to deliver advanced pharmaceuticals to specific locations within the human body. Perfect size will be critical. To address this application, a TSOM image of a gold nanoparticle can be taken and compared to a library of simulated images to obtain “best-match” images with the intent of determining if each nanoparticle passes or fails.


This new imaging technology requires a research-quality optical microscope, a camera and a microscope stage that can move at preset distances. “The setup is easily under $50,000, which is much less expensive than electron or probe microscopes currently used for measuring materials at the nanoscale,” Attota explains. “This method is another approach to extend the range of optical microscopy from microscale to nanoscale dimensional analysis.” So far, sensitivity to a 3 nm difference in line widths has been demonstrated in the laboratory.


Дизайн и программирование N-Studio 
А Б В Г Д Е Ё Ж З И Й К Л М Н О П Р С Т У Ф Х Ц Ч Ш Щ Ъ Ы Ь Э Ю Я
  • Chen Wev .  honorary member of ISSC science council

  • Harton Vladislav Vadim  honorary member of ISSC science council

  • Lichtenstain Alexandr Iosif  honorary member of ISSC science council

  • Novikov Dimirtii Leonid  honorary member of ISSC science council

  • Yakushev Mikhail Vasilii  honorary member of ISSC science council

  • © 2004-2019 ИХТТ УрО РАН
    беременность, мода, красота, здоровье, диеты, женский журнал, здоровье детей, здоровье ребенка, красота и здоровье, жизнь и здоровье, секреты красоты, воспитание ребенка рождение ребенка,пол ребенка,воспитание ребенка,ребенок дошкольного возраста, дети дошкольного возраста,грудной ребенок,обучение ребенка,родить ребенка,загадки для детей,здоровье ребенка,зачатие ребенка,второй ребенок,определение пола ребенка,будущий ребенок медицина, клиники и больницы, болезни, врач, лечение, доктор, наркология, спид, вич, алкоголизм православные знакомства, православный сайт творчeства, православные рассказы, плохие мысли, православные психологи рождение ребенка,пол ребенка,воспитание ребенка,ребенок дошкольного возраста, дети дошкольного возраста,грудной ребенок,обучение ребенка,родить ребенка,загадки для детей,здоровье ребенка,зачатие ребенка,второй ребенок,определение пола ребенка,будущий ребенок