The novel quantitative method for confocal micro X-ray fluorescence was presented.
The method involved direct deconvolution of the depth-dependent fluorescence signal.
The method is applicable only for low absorbing samples and small probing volumes.
The reconstruction of thickness and composition of stratified materials was done.
Presented method was compared with competitive quantification procedures.
A new approach for the determination of element concentration profiles in stratified materials by confocal X-ray fluorescence spectrometry was elaborated. The method was based on a direct deconvolution of the measured depth-dependent X-ray fluorescence intensity signal with the established response function of the spectrometer. Since the approach neglects the absorption of primary and secondary radiation within the probing volume, it is applicable only to low absorbing samples and small probing volumes. In the proposed approach the deconvolution is performed separately for all detectable elements and it is followed by the correction of absorption effects. The proposed approach was validated by using stratified standard samples. The determined elemental profiles were compared with the results obtained by using existing analytical approaches.